Substrate dependance, temperature dependance and temperature sensitivity and resolution of doped-silicon microcantilevers

Atomic Force Microscopy (AFM);cantilever;Heated microcantilevers;Temperature;Sensitivity;Resolution;Raman;Spectroscopy

Corbin, Elise A. ; King, William P. ; King ; William P.

关键词: Atomic Force Microscopy (AFM);    cantilever;    Heated microcantilevers;    Temperature;    Sensitivity;    Resolution;    Raman;    Spectroscopy;   

Others  :  https://www.ideals.illinois.edu/bitstream/handle/2142/14618/elise_corbin.pdf?sequence=3&isAllowed=y

美国|英语

来源: The Illinois Digital Environment for Access to Learning and Scholarship

【 摘 要 】

This thesis aims to characterize microcantilevers with integrated heater-thermometers. This researchconcentrates on characterization for use in data storage, sensing, surface science, and nano-manufacturing. Therst objective seeks to understand the speci c thermal interactions between a heated microcantilever tip and various substrates. The experiments investigate thermal conductance, thermal time constant, and temperature-dependant adhesion force between and cantilever tip and substrates of silicon, quartz, and polyimide. The second objective is to utilize a heated microcantilever as a heater-thermometer. The experiments investigate the thermal calibration sensitivity and resolution under steady and periodic conditions near room-temperature. The results were compared to the Raman spectroscopy, which measures the local temperature at the cantilever tip.