Unwarping GISAXS data

IUCrJ

Liu, J.¹ 

[1] Center for Functional Nanomaterials, Brookhaven National Laboratory, Upton, NY 11973, USA

关键词: X-RAY SCATTERING;    GISAXS;    GTSAXS;    IMAGE HEALING;    RECONSTRUCTION;    DISTORTED-WAVE BORN APPROXIMATION;   

DOI  :  10.1107/S2052252518012058

学科分类：数学（综合）

来源: International Union of Crystallography

【 摘 要 】

Grazing-incidence small-angle X-ray scattering (GISAXS) is a powerful technique for measuring the nanostructure of coatings and thin films. However, GISAXS data are plagued by distortions that complicate data analysis. The detector image is a warped representation of reciprocal space because of refraction, and overlapping scattering patterns appear because of reflection. A method is presented to unwarp GISAXS data, recovering an estimate of the true undistorted scattering pattern. The method consists of first generating a guess for the structure of the reciprocal-space scattering by solving for a mutually consistent prediction from the transmission and reflection sub-components. This initial guess is then iteratively refined by fitting experimental GISAXS images at multiple incident angles, using the distorted-wave Born approximation (DWBA) to convert between reciprocal space and detector space. This method converges to a high-quality reconstruction for the undistorted scattering, as validated by comparing with grazing-transmission scattering data. This new method for unwarping GISAXS images will broaden the applicability of grazing-incidence techniques, allowing experimenters to inspect undistorted visualizations of their data and allowing a broader range of analysis methods to be applied to GI data.

【 授权许可】

CC BY