Proceedings | |
Gas Sensing Characteristics of a WO3 Thin Film Prepared by a Sol-Gel Method | |
Iwata, Tomoya1  Yano, Mitsuaki2  Murakami, Satoshi3  | |
[1] Author to whom correspondence should be addressed.;Nanomaterials and Microdevices Research Center, Osaka Institute of Technology, Asahi-ku Ohmiya, Osaka 535-8585, Japan;Presented at the Eurosensors 2018 Conference, Graz, Austria, 9â12 September 2018 | |
关键词: gas sensor; sensing mechanism; NO gas; WO; | |
DOI : 10.3390/proceedings2130723 | |
学科分类:社会科学、人文和艺术(综合) | |
来源: mdpi | |
【 摘 要 】
Preparation and characterization of a WO3-based thin film gas sensor are reported. The WO3 film was prepared on a polished alumina substrate by a sol-gel method using an aqueous mixture solution of ammonium metatungstate hydrate and poly-vinyl alcohol, and fabricated into the gas sensor by forming interdigital electrodes on the surface. The characterization was conducted by measuring the electrical resistance change in NO, H2, and NH3 ambient as a function of gas concentration. It is revealed that the sensor has a specific sensitivity to NO, NO is detected as oxidizing gas although it is expected to be reducing gas, and the resistance changes with gas concentration in accordance with the Langmuir isotherm plot.
【 授权许可】
CC BY
【 预 览 】
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RO201910256816243ZK.pdf | 590KB | download |