Platinum Based Material for Additive Technology of Gas Sensors

Proceedings

Jahatspanian, Igor E.¹  Vlasov, Ivan S.²  Gubin, Sergey P.³  Kornilov, Denis Yu.⁴  Kim, Vitaliy P.⁵  Vasiliev, Alexey A.⁶  Sizov, Alexy S.⁷  Tkachev, Sergey V.⁸ 

[1] Author to whom correspondence should be addressed.;Enikalopov Institute of Synthetic Polymeric Materials of RAS, Moscow 117393, Russia;Kurnakov Institute of General and Inorganic Chemistry of Russian Academy of Sciences, Moscow 119991, Russia;LLC AkKo Lab, Moscow 129110, Russia;Moscow Institute of Physics and Technology, Dolgoprudny, Moscow region 141701, Russia;National Research Center “Kurchatov Institute”, Moscow 123182, Russia;Presented at the Eurosensors 2018 Conference, Graz, Austria, 9–12 September 2018.;St. Petersburg ITMO University, International laboratory “Sensor Systems”, St. Petersburg 197101, Russia

关键词: Pt based nanomaterial;    printing additive technology;    sensor microheater;    ceramic MEMS;   

DOI  :  10.3390/proceedings2130738

学科分类：社会科学、人文和艺术（综合）

来源: mdpi

【 摘 要 】

We prepared platinum nanoparticle ink usable for the fabrication of MEMS microheatersof high-temperature gas sensors and thermoresistors operating up to 450 °C and present somepreliminary results on the application of the ink in sensor microheater manufacturing. The inkconsists of platinum particles (3–8 nm) suspended in ethylene glycol solution of polyvinylpyrrolidone.The ink is usable in both InkJet and AerosolJet printers. The annealing at temperature of about 600 °Cleads to the formation of uniform microheater structure. The experiments on microheater agingconfirm the stability of the printed microstructure at 450 °C for at least one year of operation. Thesubstrates used for printing were thin alumina and LTCC ceramics with thickness of 12–20 μm.

【 授权许可】

CC BY