MEMS Sensors Based on Very Thin LTCC

Proceedings

Vasiliev, Alexey A.¹ 

关键词: gas sensor;    ceramic MEMS;    LTCC;    ink/aerosol jet printing;   

DOI  :  10.3390/proceedings1040324

学科分类：社会科学、人文和艺术（综合）

来源: mdpi

【 摘 要 】

The application of thin LTCC is a very interesting and promising approach to the fabrication of ceramic MEMS gas sensors. The attempts to use this material were restricted till now by the thickness of commercial material (>50 μm). In this work, we found a possibility to fabricate thin LTCC membranes (20–30 μm) stretched on a frame made of 100 μm thick LTCC. Aerosol jet printed Pt microheater and laser cutting of the membrane gave a cantilever shaped microhotplate with hot spot of about 300 × 300 μm. Power consumption of the heater is ~150 mW at 450 °C.

【 授权许可】

CC BY