Enhanced Sensing Performance of Integrated Gas Sensor Devices

Proceedings

Shankar, Ravi¹  Lahlalia, Ayoub²  Selberherr, Siegfried³  Neel, Olivier Le⁴ 

[1] Author to whom correspondence should be addressed.;Institute for Microelectronics, TU Wien, 1040 Vienna, Austria;Presented at the Eurosensors 2018 Conference, Graz, Austria, 9–12 September 2018;STMicroelectronics Pte Ltd., Singapore 569508, Singapore

关键词: semiconducting metal oxide;    gas sensor;    microheater;    electo-thermal simulation;   

DOI  :  10.3390/proceedings2131508

学科分类：社会科学、人文和艺术（综合）

来源: mdpi

【 摘 要 】

Semiconducting metal oxide (SMO) gas sensors, dedicated to wearable devices were designed, fabricated, and characterized in terms of power consumption, thermal distribution, and sensing capability. The sensors demonstrate a sensitivity down to ppb-level VOC concentrations at a low power consumption of 10.5 mW. To further enhance the baseline stability and sensing response characteristics at low power consumption, a new sensor structure is proposed. The design implements novel aspects in terms of fabrication and microheater geometry, leading to improved sensor performance which enables new applications for SMO gas sensors. In this work, two designs were analyzed using experimental characterization and simulation. The results of the analyses of the two sensors are comparatively reported.

【 授权许可】

CC BY