Technology for SMD Packaging MOX Gas Sensors

Proceedings

Oblov, Konstantin¹  Samotaev, Nikolay²  Ivanova, Anastasia³ 

[1] Author to whom correspondence should be addressed.;National Research Nuclear University MEPhI (Moscow Engineering Physics Institute), Kashirskoe Highway 31, 115409 Moscow, Russia;Presented at the Eurosensors 2018 Conference, Graz, Austria, 9–12 September 2018

关键词: SMD package;    MOX gas sensor;    Ceramics;    MEMS;   

DOI  :  10.3390/proceedings2130934

学科分类：社会科学、人文和艺术（综合）

来源: mdpi

【 摘 要 】

The perspective combination of laser micromilling technology and jet (aerosol) printing technologies for ceramic MEMS producing of microhotplate in the surface mounted device (SMD) package for the metal oxide (MOX) sensor is describing. There are discusses technological and economic aspects of small-scale production of gas MOX sensors. Experiments with laser micromilling of Al2O3 ceramics confirmed possibility to produce MEMS microhotplate for MOX gas sensor in SMD package with form-factor SOT-23. Developed technology process is close to 3D prototype philosophy—rapid, simple and cheap.

【 授权许可】

CC BY