Technology for SMD Packaging MOX Gas Sensors

Proceedings

Anastasia Ivanova¹  Nikolay Volkov¹  Boris Podlepetsky¹  Nikolay Samotaev¹  Nazar Zibilyuk¹  Konstantin Oblov¹ 

[1] National Research Nuclear University MEPhI (Moscow Engineering Physics Institute), Kashirskoe Highway 31, 115409 Moscow, Russia;

关键词: SMD package;    MOX gas sensor;    Ceramics;    MEMS;   

DOI  :  10.3390/proceedings2130934

来源: DOAJ

【 摘 要 】

The perspective combination of laser micromilling technology and jet (aerosol) printing technologies for ceramic MEMS producing of microhotplate in the surface mounted device (SMD) package for the metal oxide (MOX) sensor is describing. There are discusses technological and economic aspects of small-scale production of gas MOX sensors. Experiments with laser micromilling of Al₂O₃ ceramics confirmed possibility to produce MEMS microhotplate for MOX gas sensor in SMD package with form-factor SOT-23. Developed technology process is close to 3D prototype philosophy—rapid, simple and cheap.

【 授权许可】

Unknown