AlN-on-Si Square Diaphragm Piezoelectric Micromachined Ultrasonic Transducer with Extended Range of Detection

Proceedings

Rufer, Libor¹  Alasatri, Suresh²  Lee, Joshua En-Yuan³ 

[1] CNRS, Grenoble INP, TIMA, University Grenoble Alpes, 38000 Grenoble, France;Department of Electronic Engineering, City University of Hong Kong, Hong Kong, China;State Key Laboratory of Millimeter Waves, City University of Hong Kong, Hong Kong, China

关键词: aluminum nitride (AlN);    piezoelectric micromachined ultrasonic transducer (pMUT);    touchless sensing;   

DOI  :  10.3390/proceedings2130913

学科分类：社会科学、人文和艺术（综合）

来源: mdpi

【 摘 要 】

We present aluminum nitride (AlN) on silicon (Si) CMOS-compatible piezoelectric micromachined ultrasonic transducers (pMUTs) with an extended detection range of up to 140 cm for touchless sensing applications. The reported performance surpasses the current state-of-art for AlN-based pMUTs in terms of the maximum range of detection using just a pair of pMUTs (as opposed to an array of pMUTs). The extended range of detection has been realized by using a larger diaphragm allowed by fabricating a thicker diaphragm than most other pMUTs reported to date. Using a pair of pMUTs, we experimentally demonstrate the capability of range-finding by correlating the time-of-flight (TOF) between the transmit (TX) and receive (RX) pulse. The results were obtained using an experimental setup where the MEMS chip was interconnected with a customized printed circuit board (PCB) using Al wire bonds.

【 授权许可】

CC BY