Design and application of low temperature co-fired ceramic substrates for sensors in road vehicles

Transport

Eszter Horváth¹  Gábor Harsányi¹  Ádám Török² 

[1] Dept of Electronics Technology, Budapest University of Technology and Economics, Egry József str. 18, H-1111 Budapest, Hungary;Dept of Transport Economics, Budapest University of Technology and Economics, Bertalan Lajos str. 2, H-1111 Budapest, Hungary

关键词: LTCC;    fluidic channel;    lamination;    scanning acoustic microscopy;    ceramics;    vehicle;   

DOI  :  10.3846/16484142.2013.782464

学科分类：航空航天科学

来源: Vilnius Gedinimas Technical University

【 摘 要 】

Nowadays low temperature co-fired ceramics (further on: LTCC) are used in sensor technology as sensors and actuators. Sensors and actuators are playing an important role in intelligent road vehicles. These sensors and actuators are built up by LTCC Microsystems. The processing of starch powder and polymer based on sacrificial layer for fabrication of microfluidic structures of LTCC is described in this paper. In order to determine the optimal lamination parameters the quality of the structure was examined for 30 different temperature-pressure-time adjustments. Samples were examined by scanning acoustic microscope to detect the subsurface delamination and internal inhomogenities. The acoustic microscopic image of each sample from different lamination method was evaluated by image processing algorithm in MATLAB environment.

【 授权许可】

CC BY