Experimental determination of layers films thicknesses

International Journal of Physical Sciences

S. Ourabah¹ 

关键词: Thickness;    particle induced x-ray emission (PIXE);    Rutherford backscattered (RBS);    cross section;    rump.;   

DOI  :  10.5897/IJPS08.086

学科分类：物理（综合）

来源: Academic Journals

【 摘 要 】

The determination of particle induced x-ray emission (PIXE) cross sections and the concentration of elements in a material require the knowledge of the target sample thickness. In this aim, measurements of the thickness by three different methods have been performed. These are absorption of X-rays by a55Fe source, transmission of alpha particles by a241Am source and Rutherford backscattering of alpha particles produced by Van de Graff Accelerator with the use of the RUMP simulation code. The results give a thickness with uncertainties ranging from 1 to 8% according to the experimental technique used. The comparison between these methods gives an advantage for the X-rays absorption for its simplicity and accuracy, when backscattering spectrometry is preferred for thin target on backing or as a complementary technique for PIXE analysis.

【 授权许可】

CC BY