Morphology of multilayer AlN/SiN coatings with layers of different thickness

Scanning Probe Microscopy 2018

Kuznetsova, T.A.^1 ; Lapitskaya, V.A.^1 ; Chizhik, S.A.^1 ; Uglov, V.V.^2 ; Shymanski, V.I.^2 ; Kvasov, N.T.^2

AV Luikov Heat and Mass Transfer Institute of NAS Belarus, Minsk

220072, Belarus^1

Belarusian State University, Minsk

220030, Belarus^2

关键词: Adhesion forces;    AlN coatings;    Different layers;    Different thickness;    Friction coefficients;    Reactive magnetron sputtering;    Single layer;    Surface microstructures;   

Others  :  https://iopscience.iop.org/article/10.1088/1757-899X/443/1/012018/pdf
DOI  :  10.1088/1757-899X/443/1/012018

来源: IOP

【 摘 要 】

Monolayer AlN coating and multilayer AlN/SiN coatings with single layer thickness of 10 nm and 5 nm were formed using reactive magnetron sputtering. The surface microstructure of these coatings was investigated using atomic force microscopy. Roughness, adhesion forces, and friction coefficient for different layers of coatings were determined.