Analytical Modelling and FEM Simulation of Capacitive Pressure Sensor for Intraocular Pressure Sensing

1st International Conference on Contemporary Research in Mechanical Engineering with Focus on Materials and Manufacturing

机械制造;材料科学

Bhooshan Mishra, Rishabh^1 ; Santosh Kumar, S.^1 ; Mukhiya, Ravindra^1

CSIR - Central Electronics Engineering Research Institute, Rajasthan, Pilani

333031, India^1

关键词: Capacitive pressure sensors;    FEM simulations;    Intra ocular pressure;    Maximum deflection;    Parallel plates;    Pressure applications;    Pressure ranges;    Silicon materials;   

Others  :  https://iopscience.iop.org/article/10.1088/1757-899X/404/1/012026/pdf
DOI  :  10.1088/1757-899X/404/1/012026

学科分类：材料科学（综合）

来源: IOP

【 摘 要 】

The paper presents analytical modelling and Finite Element Method (FEM) based simulation of clamped circular capacitive pressure sensors for Intraocular Pressure (IOP) measurement. The parallel plate capacitive pressure sensor consists of a fixed backplate and a circular shaped clamped thin diaphragm made of silicon material. The plates are separated by a vacuum media. MATLAB® and COVENTORWARE® are used for analytical and FEM simulations, respectively, and a comparison of maximum deflection in the diaphragm, capacitance after pressure application and sensitivity is carried out. A pressure range of 0-60 mmHg is used for IOP measurement.