The change in the phase state of thin PZT layers in the region of the morphotropic phase boundary obtained by the RF magnetron sputtering with varying target-substrate distance

25th International Conference on Vacuum Technique and Technology

Pronin, V.P.^1 ; Dolgintsev, D.M.^1 ; Osipov, V.V.^1,2 ; Pronin, I.P.^2 ; Senkevich, S.V.^2 ; Yu Kaptelov, E.^2

Herzen State Pedagogical University, St.-Petersburg

191186, Russia^1

Ioffe Institute, St.-Petersburg

194021, Russia^2

关键词: Concentration region;    Ferroelectric phase;    Magnetron deposition;    Morphotropic phase boundaries;    Perovskite structures;    rf-Magnetron sputtering;    Target-substrate distance;    Tetragonal modification;   

Others  :  https://iopscience.iop.org/article/10.1088/1757-899X/387/1/012063/pdf
DOI  :  10.1088/1757-899X/387/1/012063

来源: IOP

【 摘 要 】

The relationship between the microstructure, composition, phase state, and dielectric properties with a change in the distance from the target to the substrate (in the range 30-70 mm) was studied for high-frequency magnetron deposition of thin layers of lead zirconatetitanate (PZT). The composition of the sputtered target of the solid solution of PZT (PbZr0.54Ti0.46O3) corresponded to the region of the morphotropic phase boundary. After depositing the film, the perovskite structure was formed at 580 °C. It is shown that the variation of the distance leads to a change in the composition (elemental ratio of Zr/Ti atoms) within 2%, the character of the spherulite radiant microstructure of the layers, the volumes of monoclinic and tetragonal modifications of the ferroelectric phase coexisting in this concentration region, and also the dielectric properties.