Determination of heat fluxes and surface temperatures during magnetron sputtering with a cold and hot target

25th International Conference on Vacuum Technique and Technology

Bychkov, S.P.^1

Department Electronic Technologies in Mechanical Engineering, N.E. Bauman Moscow State Technical University, 2nd Baumanskaya ul. 5, Moscow

105005, Russia^1

关键词: Algebraic method;    Calculation models;    Method of calculation;    Power characteristic;    Radiant flux;    Surface temperatures;   

Others  :  https://iopscience.iop.org/article/10.1088/1757-899X/387/1/012010/pdf
DOI  :  10.1088/1757-899X/387/1/012010

来源: IOP

【 摘 要 】

The method of calculation of heat fluxes and surface temperatures during magnetron sputtering of cold and hot targets developed from using the algebraic method for calculating radiant fluxes is presented, which allows to predict the required power characteristics for obtaining the desired temperature on the target and the substrate. Comparison of the experimental data and the demonstrated results of the calculations testify to the possibility of applying this technique. The temperature on the substrate can be controlled by changing the distance between the substrate and the target within certain limits, and the value of the distance can be estimated using the suggested calculation model.