To the calculation of the equation of measurements of a MEMS vacuum transducer

25th International Conference on Vacuum Technique and Technology

Garshin, A.^1 ; Gorobey, V.^1 ; Kuvandykov, R.^1

FGUP VNIIM N. A. D. I. Mendeleev, Saint-Petersburg

190005, Russia^1

关键词: Absolute pressure;    Measurements of;    MEMS technology;   

Others  :  https://iopscience.iop.org/article/10.1088/1757-899X/387/1/012019/pdf
DOI  :  10.1088/1757-899X/387/1/012019

来源: IOP

【 摘 要 】

The article is devoted to the numerical method of calculating the vacuum transducer, created by MEMS technology and designed to measure the absolute pressure in a wide range from 10 to 10,000 Pa.