MEMS ion source for mass spectrometer integrated on a chip

16th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications

物理学;能源学

Szyszka, P.^1 ; Grzebyk, T.^1 ; Górecka-Drzazga, A.^1 ; Dziuban, J.A.^1

Faculty of Microsystem Electronics and Photonics, Wroclaw University of Science and Technology, 11/17 Janiszewskiego Str., Wroclaw

50-372, Poland^1

关键词: Deposited carbon nanotubes;    Electron-impact ion sources;    Field emission electron sources;    Ion-beam formation;    Manufacturing process;    MEMS technology;    Miniature mass spectrometers;    Test structure;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/773/1/012099/pdf
DOI  :  10.1088/1742-6596/773/1/012099

来源: IOP

【 摘 要 】

The paper describes silicon-glass MEMS electron impact ion source developed for miniature mass spectrometer (MS) integrated on a chip. The device consists of the field emission electron source with an electrophoretically deposited carbon nanotube cathode and ion beam formation electrodes. Ion source structure has been fabricated using MEMS technology. A complete manufacturing process of the test structures has been successfully elaborated and implemented.