Micro/nano structures fabricated by femtosecond laser on aluminum doped zinc oxide surface

2018 International Conference on Advanced Materials, Intelligent Manufacturing and Automation

材料科学;机械制造;运输工程

Lu, Yanhui^1 ; Wang, Qingsong^1 ; Pan, Changji^1

Laser Micro/Nano Fabrication Laboratory, School of Mechanical Engineering, Beijing Institute of Technology, 100081, China^1

关键词: Aluminum-doped zinc oxide;    Electric field intensities;    Laser fluences;    Micro/nanostructures;    Patterned films;    Photo-electric conversion efficiency;    Scanning speed;    Surface Plasmon Polaritons (SPP);   

Others  :  https://iopscience.iop.org/article/10.1088/1757-899X/382/2/022022/pdf
DOI  :  10.1088/1757-899X/382/2/022022

学科分类：材料科学（综合）

来源: IOP

【 摘 要 】

Nanodot and ripples were fabricated on the aluminum doped zinc oxide (AZO) surface by femtosecond laser irradiation. As increase of laser fluence, the surface of nandot is smooth and the surface contains numbers nano-cracks due to a strong thermal cycling effect occurrence. The ripples with period approximately 340nm and 660nm were obtained by changing laser fluence and scanning speed. At higher laser fluence, there is a phenomenon that evaporation and redeposition. All of ripples can be explained by surface plasmon polaritons (SPP). In addition, the finite-difference time-domain (FDTD) method is used to simulate and analyze the performance of ripples. The electric field intensity of patterned film is stronger than unpatterned film. Thus, the ripples can be used for improving the photoelectric conversion efficiency of solar energy.