Fiber Fabry-Perot cavity microphone and its application to monitoring laser cutting

2018 International Conference on Advanced Materials, Intelligent Manufacturing and Automation

材料科学;机械制造;运输工程

Wang, Na^1 ; Cheng, Jin^2

AVIC APC Integration Equipment Co. Ltd., Beijing

102206, China^1

Research Center for Sensor Technology, Beijing Information Science and Technology University, Beijing

100101, China^2

关键词: Fiber Fabry-Perot;    High sensitivity;    High thermal stability;    ITS applications;    Laser process;    Laser-induced sounds;    Mass production;    Temperature range;   

Others  :  https://iopscience.iop.org/article/10.1088/1757-899X/382/4/042044/pdf
DOI  :  10.1088/1757-899X/382/4/042044

学科分类：材料科学（综合）

来源: IOP

【 摘 要 】

Fiber Fabry-Perot cavity microphone has attracted much attention due to some outstanding advantages of high sensitivity, small probe, resistance to electromagnetic wave, etc. In this paper, we reported fiber Fabry-Perot cavity microphone with a high sensitivity of more than 200mV/Pa and high thermal stability in the temperature range from -20°C to 60°C. Furthermore, the fiber Fabry-Perot cavity microphone was firstly used to monitor laser cutting by laser-induced sound. By employing the fiber Fabry-Perot cavity microphone, we can precisely control the laser processing time by laser-induced sound. This is of great benefit to saving time for mass production.