Modeling and Simulation of an Atomic Force Microscopy System in the Z Direction

4th Annual International Workshop on Materials Science and Engineering

Wang, Yanyan^1 ; Wu, Sen^2

Tianjin Key Laboratory of Information Sensing and Intelligent Control, Tianjin University of Technology and Education, Tianjin

300222, China^1

State Key Laboratory of Precision Measuring Technology and Instruments, Tianjin University, Tianjin

300072, China^2

关键词: Advanced controller;    Design and implementations;    Model and simulation;    Nano-scale imaging;    Scanning rate;    Simple system;    Simulation systems;    Z-directions;   

Others  :  https://iopscience.iop.org/article/10.1088/1757-899X/381/1/012089/pdf
DOI  :  10.1088/1757-899X/381/1/012089

来源: IOP

【 摘 要 】

Atomic Force Microscopy (AFM) is a powerful tool in nanoscale imaging and manipulation. Many efforts have been made to improve its scanning rate by implementing many advanced controllers. The design of the controllers requires the achievement of the model of the AFM system, especially in the Z direction. The paper proposes a simple system identification method to estimate the model of the AFM in the Z direction by utilizing the experimental data. The simulation system is established to obtain the performance of controllers. Experiments demonstrate the simulation system is effective and helpful for the successful design and implementation of the controllers in the actual AFM system.