Nanoscale imaging applications of soft X-ray microscope based on a gas-puff target source

X-Ray Microscopy Conference 2016

Wachulak, P.W.^1 ; Torrisi, A.^1 ; Bartnik, A.^1 ; Wegrzynski, L.^1 ; Fok, T.^1 ; Fiedorowicz, H.^1

Institute of Optoelectronics, Military University of Technology, Kaliskiego 2 Str., Warsaw

00-908, Poland^1

关键词: Exposure-time;    Fresnel zone plate;    Gas puff targets;    Grazing incidence;    Nano-scale imaging;    Soft x-ray sources;    Spatial resolution;    Spectral range;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/849/1/012050/pdf
DOI  :  10.1088/1742-6596/849/1/012050

来源: IOP

【 摘 要 】

A compact microscope based on nitrogen double stream gas puff target soft X-ray source, which emits radiation in the water-window spectral range, at the wavelength of λ = 2.88 nm, is presented. The microscope, employing ellipsoidal grazing incidence condenser and a Fresnel zone plate objective, is capable of capturing images with a 60 nm spatial resolution and exposure time as low as a few seconds. Examples of different applications of the SXR microscopy, and its applicability for various fields of science, are presented and discussed.