High-frequency Magnetic Properties of [Fe80Ni20-O/SiO2]n Multilayer Film Served as Magnetic Core of Solenoid Inductor

4th Annual International Workshop on Materials Science and Engineering

Wang, Laisen^1 ; Xie, Jia^1 ; Su, Amei^1 ; Liu, Xiaolong^1 ; Xu, Lei^1 ; Wang, Zhenwei^1 ; Peng, Dongliang^1

Department of Materials Science and Engineering, College of Materials, Xiamen University, Xiamen, Fujian

361005, China^1

关键词: Electromagnetic devices;    GHz frequencies;    High frequency HF;    High frequency performance;    Inductance densities;    Operation frequency ranges;    Quality factors;    Solenoid inductors;   

Others  :  https://iopscience.iop.org/article/10.1088/1757-899X/381/1/012114/pdf
DOI  :  10.1088/1757-899X/381/1/012114

来源: IOP

【 摘 要 】

In this study, we report the significant enhancement of high-frequency performance of solenoid inductors incorporated [Fe80Ni20-O/SiO2]n magnetic multilayer film prepared by magnetron sputtering as magnetic core over their air-core counterparts. The integrated solenoid inductor with multilayered magnetic core revealed excellent high-frequency performance in a wide operation frequency range of 0-4 GHz, and acquired a peak inductance density of 72 nH/mm2. Compared to their air-core solenoid inductors with equivalent geometry, there were more than 35-fold enhancement for inductance and 24-fold enhancement for peak quality factor of the 21-turn integrated solenoid inductor with multilayered magnetic core operating at 1.5 GHz. The results indicated that the multilayer magnetic core had promising prospect for applications in GHz frequency electromagnetic devices.