Ammonia, acetone and ethanol gas sensing characteristics of CuO thin films grown by sputtering

2nd International Conference on Materials Science and Technology

Anna Jacob, Anju^1 ; Balakrishnan, L.^2 ; Meher, S.R.^3 ; Sivacoumar, R.^4 ; Shambavi, K.^5 ; Alex, Z.C.^4

School of Electronics Engineering, VIT University, Vellore

632 014, India^1

Department of Physics, Government College of Technology, Coimbatore

641 013, India^2

Department of Physics, School of Advanced Sciences, VIT University, Vellore

632 014, India^3

Department of Sensor and Biomedical Technology, School of Electronics Engineering, VIT University, Vellore

632 014, India^4

Department of Communication, School of Electronics Engineering, VIT University, Vellore

632 014, India^5

关键词: Ethanol sensing;    Fourier transform infrared spectrometer;    Gas sensing characteristics;    Gas sensing properties;    rf-Magnetron sputtering;    Sensing characteristics;    UV-vis spectrometer;    X ray diffractometers;   

Others  :  https://iopscience.iop.org/article/10.1088/1757-899X/360/1/012062/pdf
DOI  :  10.1088/1757-899X/360/1/012062

来源: IOP

【 摘 要 】

Here, we have reported the sensing characteristics of CuO thin films towards volatile gases like ammonia, acetone and ethanol. The CuO films were deposited on glass substrate by RF magnetron sputtering at 350 °C and 400 °C. The characteristics of CuO thin films grown at both temperatures were analyzed using X-ray diffractometer (XRD), UV-Vis spectrometer, atomic force microscope (AFM), scanning electron microscope (SEM) and Fourier transform infrared spectrometer (FTIR). The thin films showed mesoporous morphology with average crystallite size of 78 nm and 36 nm for films grown at 350 °C and 400 °C, respectively. As the film grown at 400 °C showed better properties, it has been preferred for the gas sensing analysis. Gas sensing properties of the film towards different concentration (50-250 ppm) of ammonia, acetone and ethanol were studied in chemi-resistive mode. As expected, an increase in resistance with concentration of gases was observed due to the p-type nature of CuO thin films. Further, the film showed comparatively better sensitivity towards ethanol than other gases.