Influence of the thickness and thermal treatment on the humidity and ethanol sensing properties of Sn-O-Te layers

18th International Summer School on Vacuum, Electron and Ion Technologies

Georgieva, B.^1 ; Pirov, J.^1 ; Podolesheva, I.^1

Acad. J. Malinowski Institute of Optical Materials and Technologies, Bulgarian Academy of Sciences, Acad. G. Bonchev Str., Bl.109, 1113 Sofia, Bulgaria^1

关键词: Amorphous layer;    Co-evaporations;    Electrical resistance change;    Ethanol sensing;    Gas sensing properties;    Layer composition;    Layer thickness;    Thermal vacuum;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/514/1/012033/pdf
DOI  :  10.1088/1742-6596/514/1/012033

来源: IOP

【 摘 要 】

Thin Sn-O-Te layers were prepared by thermal vacuum co-evaporation of Sn and TeO2. Depending on the atomic ratio of Sn to Te (RSn/Te) and on the subsequent treatments, layers sensitive towards humidity or ethanol vapor were obtained. The as-deposited amorphous layers with RSn/Te0.8 and a thickness of 60 nm showed very good characteristics as humidity sensors operating at room temperature. Layers with RSn/Te2.3, additionally doped with Pt and crystallized by thermal treatment up to 360 °C, were found to be sensitive to ethanol vapor at 120 °C and 240 °C. The RSn/Teratio in the films was estimated by EDS. The composition and structure of the thermally treated layers were studied by X-ray diffraction (XRD). The sensitivity to humidity and ethanol was determined on the basis of the electrical resistance changes in the presence of humidity and ethanol vapor. The influence was studied of the layer thickness and of the sequence of thermal treatment and Pt doping on the layer composition and gas sensing properties.