Study on the Weak Stress in Flexural MEMS Cantilever

3rd International Conference on Mechanical and Aeronautical Engineering

机械制造;航空航天工程

Ge, Yuetao^1 ; Ren, Yan^1

Beijing HIWING Scientific and Technological Information Institute, Beijing

100074, China^1

关键词: Mems cantilevers;    Multilayer structures;    Piezo-resistive;    Protective layers;    Sensor designs;    Support layer;    Weak force;   

Others  :  https://iopscience.iop.org/article/10.1088/1757-899X/326/1/012008/pdf
DOI  :  10.1088/1757-899X/326/1/012008

学科分类：航空航天科学

来源: IOP

【 摘 要 】

In order to design a better piezoresistive MEMS cantilever beam, especially for cantilever beams that will detect weak forces or will be subjected to weak forces, this paper uses study on the weak stress in flexural MEMS cantilever. The sensor design structure, divided into protective layer, piezoresistive layer, support layer. The protective layer is responsible for protecting the piezoresistive layer so that the varistor is insulated from the outside; the piezoresistive layer is used to make the varistor; the support layer forms the main part of the cantilever beam, the majority of the cantilever beam. This paper has some value for cantilever multilayer structure design and cantilever beam size design.