Method for Evaluating the Corrosion Resistance of Aluminum Metallization of Integrated Circuits under Multifactorial Influence

4th International Conference on Advanced Engineering and Technology

Kolomiets, V.I.^1

National Research Moscow State University of Civil Engineering, 26, Yaroslavskoye Shosse, Moscow

129337, Russia^1

关键词: Accelerated tests;    Aluminum metallization;    Climatic factors;    Modified arrhenius equations;    Supply voltages;    Trouble-free operations;   

Others  :  https://iopscience.iop.org/article/10.1088/1757-899X/317/1/012059/pdf
DOI  :  10.1088/1757-899X/317/1/012059

来源: IOP

【 摘 要 】

The influence of complex influence of climatic factors (temperature, humidity) and electric mode (supply voltage) on the corrosion resistance of metallization of integrated circuits has been considered. The regression dependence of the average time of trouble-free operation t on the mentioned factors has been established in the form of a modified Arrhenius equation that is adequate in a wide range of factor values and is suitable for selecting accelerated test modes. A technique for evaluating the corrosion resistance of aluminum metallization of depressurized CMOS integrated circuits has been proposed.