One-step microwave plasma enhanced chemical vapor deposition (MW-PECVD) for transparent superhydrophobic surface

2017 International Conference on Sensors, Materials and Manufacturing

工业技术;材料科学;机械制造

Thongrom, Sukrit^1,2 ; Tirawanichakul, Yutthana^1 ; Munsit, Nantakan^1,2 ; Deangngam, Chalongrat^1,2

Department of Physics, Faculty of Science, Prince of Songkla University, Songkhla

90110, Thailand^1

Center of Excellence in Nanotechnology for Energy (CENE), Prince of Songkla University, Songkhla

90110, Thailand^2

关键词: Anti-reflection effects;    Environmental-friendly;    Fabrication technique;    High-electron-density;    Microwave plasma enhanced chemical vapor depositions;    Polydimethylsiloxane PDMS;    Super-hydrophobic surfaces;    Water contact angle;   

Others  :  https://iopscience.iop.org/article/10.1088/1757-899X/311/1/012015/pdf
DOI  :  10.1088/1757-899X/311/1/012015

来源: IOP

【 摘 要 】

We demonstrate a rapid and environmental friendly fabrication technique to produce optically clear superhydrophobic surfaces using poly (dimethylsiloxane) (PDMS) as a sole coating material. The inert PDMS chain is transformed into a 3-D irregular solid network through microwave plasma enhanced chemical vapor deposition (MW-PECVD) process. Thanks to high electron density in the microwave-Activated plasma, coating can be done in just a single step with rapid deposition rate, typically much shorter than 10 s. Deposited layers show excellent superhydrophobic properties with water contact angles of ∼170° and roll-off angles as small as ∼3°. The plasma-deposited films can be ultrathin with thicknesses under 400 nm, greatly diminishing the optical loss. Moreover, with appropriate coating conditions, the coating layer can even enhance the transmission over the entire visible spectrum due to a partial anti-reflection effect.