Studies on sputtered ZnO:CdO thin films for TCO application

International Conference on Advances in Materials and Manufacturing Applications 2017

Maragatham, V.^1 ; Sushmitha, V.^1 ; Deepak Raj, P.^1 ; Sridharan, M.^1

Functional Nanomaterials and Device Laboratory, Centre for Nanotechnology and Advanced Biomaterials, School of Electrical and Electronics Engineering, SASTRA University, Thanjavur

613 401, India^1

关键词: CdO thin films;    Diffraction planes;    Direct current magnetron sputtering;    Electrical and optical properties;    Glass substrates;    Ohmic behaviour;    UV-vis spectrophotometry;    Zinc oxide (ZnO);   

Others  :  https://iopscience.iop.org/article/10.1088/1757-899X/310/1/012021/pdf
DOI  :  10.1088/1757-899X/310/1/012021

来源: IOP

【 摘 要 】

Zinc oxide (ZnO) and cadmium oxide (CdO) thin films were studied for their electrical and optical properties for transparent conducing oxides (TCO) application. Using zinc (Zn) and cadmium (Cd) as targets, ZnO and CdO thin films were deposited and also ZnO:CdO thin film samples were co-deposited on to the glass substrates by reactive direct current (DC) magnetron sputtering. X-ray diffraction (XRD patterns of ZnO and CdO films showed the diffraction planes corresponding to ZnO (002) and CdO (200) respectively. The optical band gap of the films varied between 2.5 - 3.2 eV as determined by UV-VIS spectrophotometry. The films exhibited Ohmic behaviour.