Micro-mirror with hybrid photoelectric-electrostatic driving of PLZT ceramic

International Conference on Mechanical Engineering and Applied Composite Materials

机械制造;材料科学

Tang, Y.J.^1 ; Chen, Y.S.^2 ; Qiao, K.^2 ; Wang, X.J.^2

School of Intelligent Science and Control Engineering, Jinling Institute of Technology, Nanjing

211169, China^1

School of Mechanical Engineering, Nanjing University of Science and Technology, Nanjing

210094, China^2

关键词: Anomalous photovoltaic effects;    Closed-loop control;    Coupling relationships;    Dynamic controls;    Electrostatic actuation;    Electrostatic driving;    Multi-physics;    PLZT ceramics;   

Others  :  https://iopscience.iop.org/article/10.1088/1757-899X/307/1/012016/pdf
DOI  :  10.1088/1757-899X/307/1/012016

学科分类：材料科学（综合）

来源: IOP

【 摘 要 】

A novel micro-mirror driven by hybrid photoelectric-electrostatic actuation of PLZT ceramic is proposed based on the anomalous photovoltaic effect of PLZT ceramic. On the basis of analysis of coupling relationships of multi-physics fields of PLZT ceramic, the photovoltage of PLZT ceramic is established during illumination and light off phases. Furthermore, the relationship between the driving displacement and the photovoltage of PLZT ceramics is present. In addition, the feasibility of micro-mirror with hybrid photoelectric-electrostatic driving is verified via closed-loop control for photovoltage of PLZT ceramic. The experimental results show that the photovoltage of PLZT ceramics has good dynamic control precision using on-off closed-loop control method.