PLZT Ceramic Driving Rotary Micro-mirror Based on Photoelectric-electrostatic Mechanism

5th Annual International Conference on Material Science and Engineering

Tang, Yujuan^1 ; Yang, Zhong^1 ; Chen, Yusong^2 ; Wang, Xinjie^2

School of Intelligent Science and Control Engineering, Jinling Institute of Technology, Nanjing

211169, China^1

School of Mechanical Engineering, Nanjing University of Science and Technology, Nanjing

210094, China^2

关键词: Anomalous photovoltaic effects;    Closed-loop control;    Dynamic controls;    Electrostatic actuation;    Electrostatic driving;    Multi-physics;    Photo-induced voltage;    Rotation angles;   

Others  :  https://iopscience.iop.org/article/10.1088/1757-899X/275/1/012048/pdf
DOI  :  10.1088/1757-899X/275/1/012048

来源: IOP

【 摘 要 】

Based on the anomalous photovoltaic effect of PLZT, a rotary micro-mirror driven by hybrid photoelectric-electrostatic actuation of PLZT ceramic is proposed. Firstly, the mathematical modelling of coupled multi-physics fields of PLZT ceramic is established during illumination and light off phases. Then, the relationship between the rotation angle and the photovoltage of PLZT ceramics is established. In addition, the feasibility of rotary micro-mirror with hybrid photoelectric-electrostatic driving is verified via closed-loop control for photo-induced voltage of PLZT ceramic. The experimental results show that the photo-induced voltage of PLZT ceramics has good dynamic control precision using on-off closed-loop control method.