Modeling of Lithium Niobate (LiNbO3) and Aluminum Nitride (AlN) Nanowires Using Comsol Multiphysics Software: The Case of Pressure Sensor

2nd International Conference on Advanced Materials

Ahmad, A.A.^1 ; Alsaad, A.^1 ; Al-Bataineh, Q.M.^1 ; Al-Naafa, M.A.^2

Department of Physical Sciences, Jordan University of Science and Technology, P. O. Box 3030, Irbid

22110, Jordan^1

Department of Chemical Engineering, University of Hafr Albatin, Saudi Arabia^2

关键词: AlN nanowire;    Aluminum nitride (AlN);    Applied forces;    Comsol multiphysics;    Lithium niobate;    Maximum displacement;    Piezoelectric response;    Pressure sensing;   

Others  :  https://iopscience.iop.org/article/10.1088/1757-899X/305/1/012007/pdf
DOI  :  10.1088/1757-899X/305/1/012007

来源: IOP

【 摘 要 】

In this study, Lithium niobate (LiNbO3) and Aluminum nitride (AlN) nanostructures were designed and investigated using the COMSOL Multiphysics software for pressure sensing applications. The Finite Element Method (FEM) was used for solving the differential equations with various parameters such as size, length, force, etc. The variation of the total maximum displacement as a function of applied force for various NWs lengths and the variation of the voltage as a function of applied force were plotted and discussed. AlN nanowires exhibit a better piezoelectric response than LiNbO3nanowires do.