Focussed ion beam thin sample microanalysis using a field emission gun electron probe microanalyser

15th European Workshop on Modern Developments and Applications in Microbeam Analysis; 7th Meeting of the International union of Microbeam Analysis Societies

材料科学;物理学

Kubo, Y.^1

Sumitomo Electric Industries Ltd., Analysis Technology Research Center, 1-1-3, Shimaya, Konohana-ku Osaka-shi, Osaka

554-0024, Japan^1

关键词: Acceleration voltages;    Electron beam damage;    Electron probe microanalyser;    Field emission guns;    Focussed ion beams;    Low energy x rays;    Spatial resolution;    Wavelength-dispersive X-ray spectrometries;   

Others  :  https://iopscience.iop.org/article/10.1088/1757-899X/304/1/012007/pdf
DOI  :  10.1088/1757-899X/304/1/012007

学科分类：材料科学（综合）

来源: IOP

【 摘 要 】

Field emission gun electron probe microanalysis (FEG-EPMA) in conjunction with wavelength-dispersive X-ray spectrometry using a low acceleration voltage (Vacc) allows elemental analysis with sub-micrometre lateral spatial resolution (SR). However, this degree of SR does not necessarily meet the requirements associated with increasingly miniaturised devices. Another challenge related to performing FEG-EPMA with a low Vaccis that the accuracy of quantitative analyses is adversely affected, primarily because low energy X-ray lines such as the L- and M-lines must be employed and due to the potential of line interference. One promising means of obtaining high SR with FEG-EPMA is to use thin samples together with high Vaccvalues. This mini-review covers the basic principles of thin-sample FEG-EPMA and describes an application of this technique to the analysis of optical fibres. Outstanding issues related to this technique that must be addressed are also discussed, which include the potential for electron beam damage during analysis of insulating materials and the development of methods to use thin samples for quantitative analysis.