Establishment and analysis of coupled dynamic model for dual-mass silicon micro-gyroscope

2017 International Conference on Material Engineering and Advanced Manufacturing Technology

Wang, Zhanghui^1 ; Qiu, Anping^1 ; Shi, Qin^1 ; Zhang, Taoyuan^2

School of Mechanical Engineering, Nanjing University of Science and Technology, Nanjing, China^1

Shanghai Aerospace Control Technology Institute, Shanghai, China^2

关键词: Coupled dynamics;    Finite element method simulation;    Micro-gyroscope;    Modal coupling coefficient;    Modal matrix;   

Others  :  https://iopscience.iop.org/article/10.1088/1757-899X/282/1/012019/pdf
DOI  :  10.1088/1757-899X/282/1/012019

来源: IOP

【 摘 要 】

This paper presents a coupled dynamic model for a dual-mass silicon micro-gyroscope (DMSG). It can quantitatively analyze the influence of left-right stiffness difference on the natural frequencies, modal matrix and modal coupling coefficient of the DMSG. The analytic results are verified by using the finite element method (FEM) simulation. The model shows that with the left-right stiffness difference of 1%, the modal coupling coefficient is 12% in the driving direction and 31% in the sensing direction. It also shows that in order to achieve good separation, the stiffness of base beam should be small enough in both the driving and sensing direction.