The development of a bistable microdrive for the micromechanical gyroscopes

18th Russian Youth Conference on Physics of Semiconductors and Nanostructures, Opto- and Nanoelectronics

Enns, Y.B.^1 ; Kleimanov, R.V.^1 ; Kazakin, A.N.^1 ; Pyatishev, E.N.^1 ; Korshunov, A.V.^1

Peter the Great St.Petersburg Polytechnic University, St.Petersburg, 29, Polytechnicheskaya

195251, Russia^1

关键词: Bistables;    Control voltages;    Electrostatic comb drives;    High-precision;    Micro-gyroscope;    Micro-mechanical;    Microdrives;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/816/1/012042/pdf
DOI  :  10.1088/1742-6596/816/1/012042

来源: IOP

【 摘 要 】

In present work, the model and methodology for designing of arcuate arc-shallow MEMS with buckling was developed and tested. The efficiency of the model is confirmed experimentally. The result of the present survey is an increase of the efficiency of the exciting electrostatic comb drive MMG of high precision. The result of this research allows to reduce the control voltage and noise of a microgyroscope.