The microstructure, mechanical and electrical properties of Niobium pentoxide-doped Titanium oxide ceramic targets

17th IUMRS International Conference in Asia

Ling, Qi^1 ; Xu, Ting Ting^1 ; Wu, Lian Zi^1 ; Peng, Wei^1 ; Zhu, Zuo Xiang^1 ; Xie, Sheng Hui^1 ; Yang, Hai Peng^1 ; Gao, Ji Hua^1 ; Gao, Ling^1 ; Yang, Hai Tao^1

Key Laboratory of Functional Materials of Shenzhen, Shenzhen Engineering Laboratory for Advanced Technology of Ceramics, Guangdong Research Center for Interfacial Engineering of Functional Materials, College of Materials Science and Engineering, Shenzhen University, Shenzhen

518060, China^1

关键词: Chemical state;    Densification behavior;    Doping concentration;    Mechanical and electrical properties;    Niobium pentoxide;    Oxide ceramics;    Relative density;    Sintered ceramics;   

Others  :  https://iopscience.iop.org/article/10.1088/1757-899X/182/1/012005/pdf
DOI  :  10.1088/1757-899X/182/1/012005

来源: IOP

【 摘 要 】

Nb2O5doped TiO2(NTO) ceramic targets were prepared by sintering in Ar at l350 °C for 2 hours. The morphologies structures, densification behavior, mechanical and electrical properties of the sintered ceramic targets with different doping concentration were investigated. The results show that the Nb2O5content of increase from 0 wt% to 10 wt% not only enhance the densification but promote the grain growth. The morphologies, compositions, microstructure, and chemical states were characterized by SEM and XRD. The relative density, grain size and resistivity of 7.5 wt% content sintered at 1350 °C in Ar were 94.5%, 13.76 μm, and 7.8×10-2Ω•cm, respectively.