Coating multilayer material with improved tribological properties obtained by magnetron sputtering

13th International Conference on Tribology

Mateescu, A.O.^1 ; Mateescu, G.^1 ; Balasoiu, M.^1,2 ; Pompilian, G.O.^3 ; Lungu, M.^3,4

Horia Hulubei National Institute for Research and Development in Physics and Nuclear Engineering, 30 Reactorului Street, Magurele, Ilfov

077125, Romania^1

Joint Institute for Nuclear Research, Frank Laboratory of Neutron Physics, 6 Joliot-Curie, Moscow Region, Dubna

141980, Russia^2

National Institute of Physics, Plasma and Radiation Physics, 409 Atomistilor Stret, Magurele, Ilfov

077125, Romania^3

University of Bucharest, Faculty of Physics, 405 Atomistilor Stret, Magurele, Ilfov

0777125, Romania^4

关键词: Chemical materials;    Coefficient of frictions;    Individual components;    Magnetron sputtering process;    Multilayer materials;    Multilayer structures;    Tribological coatings;    Tribological properties;   

Others  :  https://iopscience.iop.org/article/10.1088/1757-899X/174/1/012059/pdf
DOI  :  10.1088/1757-899X/174/1/012059

来源: IOP

【 摘 要 】

This work is based on the Patent no. RO 128094 B1, granted by the Romanian State Office for Inventions and Trademarks. The goal of the work is to obtain for investigations tribological coatings with multilayer structure with improved tribological properties, deposited by magnetron sputtering process from three materials (sputtering targets). Starting from compound chemical materials (TiC, TiB2and WC), as sputtering targets, by deposition in argon atmosphere on polished stainless steel, we have obtained, based on the claims of the above patent, thin films of multilayer design with promising results regarding their hardness, elastic modulus, adherence, coefficient of friction and wear resistance. The sputtering process took place in a special sequence in order to ensure better tribological properties to the coating, comparing to those of the individual component materials. The tribological properties, such as the coefficient of friction, are evaluated using the tribometer test.