XPS study of the structure of nitrogen doped a-C film

7th International Conference Radiation-thermal Effects and Processes in Inorganic Materials

材料科学;物理学

Piliptsou, D.G.^1 ; Rudenkov, A.S.^1 ; Rogachev, A.V.^1,2 ; Jiang, Xiaohong^1 ; Lychnikov, P.A.^3 ; Emel'Yanov, V.A.^2

International Chinese-Belarusian Scientific Laboratory on Vacuum-Plasma Technology, Nanjing University of Science and Technology, Xiao Ling Wei 200, Nanjing

210094, China^1

Francisk Skorina Gomel State University, Sovetskaya, 104, Gomel

246019, Belarus^2

Moscow Technological University (MIREA), Vernadsky 78, Moscow

119454, Russia^3

关键词: a-C film;    Carbon coating;    Ion nitriding;    Nitrogen-doped;    Surface layers;   

Others  :  https://iopscience.iop.org/article/10.1088/1757-899X/168/1/012103/pdf
DOI  :  10.1088/1757-899X/168/1/012103

学科分类：材料科学（综合）

来源: IOP

【 摘 要 】

It was found change of phase composition and structure of the carbon coating, subjected to ion nitriding. It is shown that ion nitriding is in the surface layers of increasing the share of sp2-phase with a decrease in the size of the clusters. It was found that the ion nitriding of carbon coatings are formed CNx connections to increase the number of the type of N-Csp2 bonds.