会议论文详细信息
7th Conference on Low temperature Plasma in the Processes of Functional Coating Preparation
Antifriction coatings based on a-C for biomedicine applications
Yurjev, Y.N.^1 ; Kiseleva, D.V.^1 ; Zaitcev, D.A.^1 ; Sidelev, D.V.^1 ; Korneva, O.S.^2
Department of Experimental Physics, National Research Tomsk Polytechnic University, Tomsk
634050, Russia^1
Materials Properties Measurement Centre, National Research Tomsk Polytechnic University, Tomsk
634050, Russia^2
关键词: a-C film;    Anti-friction coatings;    Dual magnetron sputtering system;    High hardness;    Influence of magnetic field;    Low friction;    Mirror magnetic field;   
Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/669/1/012066/pdf
DOI  :  10.1088/1742-6596/669/1/012066
来源: IOP
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【 摘 要 】

This article reports on the investigation of mechanical properties of carbon films deposited by dual magnetron sputtering system with closed and mirror magnetic field. There is shown that a-C films with predominantly sp2-phase have relatively high hardness (up to 20 GPa) and low friction index (∼0.01). The influence of magnetic field on friction index is determined. The analysis of experimental data shows the obtained a-C samples can be used for biomedicine applications.

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