Synthesis and characterization of structural and optical properties of single crystalline a-TiO2 films on MgAl2O4(111) substrate

1st International Conference on New Material and Chemical Industry

材料科学;化学工业

Xu, Haisheng^1 ; Feng, Xianjin^1 ; Luan, Caina^1 ; Ma, Jin^1

School of Microelectronics, Shandong University, Jinan

250100, China^1

关键词: A3. metal organic chemical vapor deposition (MOCVD);    Anatase structures;    Epitaxial relationships;    Morphology and composition;    Single-crystalline;    Structural and optical properties;    Substrate temperature;    Synthesis and characterizations;   

Others  :  https://iopscience.iop.org/article/10.1088/1757-899X/167/1/012036/pdf
DOI  :  10.1088/1757-899X/167/1/012036

学科分类：材料科学（综合）

来源: IOP

【 摘 要 】

Anatase phase TiO2(a-TiO2) films have been deposited on MgAl2O4(111) substrates by the metal organic chemical vapor deposition (MOCVD) method at the substrate temperatures of 500-650°C. The structural analyses showed that the films were highly (004) oriented with tetragonal anatase structure and the epitaxial relationship was given as a-TiO2(004)||MgAl2O4(111). The sample prepared at 600°C exhibited the best crystallization with a single-crystalline epitaxial film. The average transmittance of every TiO2film in the visible range exceeded 90% excluding the influence of the substrate. The morphology and composition of the TiO2films have also been studied in detail.