Influence of antenna dielectric cover on the parameters of the electrode microwave discharge

11th International Conference on "Mesh methods for boundary-value problems and applications"

Lebedev, Yu.A.^1 ; Tatarinov, A.V.^1 ; Titov, A.Yu.^1 ; Epstein, I.L.^1

Topchiev Institute of Petrochemical Synthesis of the Russian Academy of Sciences (TIPS RAS), Moscow, Russia^1

关键词: Catalytic properties;    Charge deposition;    Dielectric cover;    Dielectric surface;    Microwave discharge;    Nonequilibrium plasmas;    Plasma volume;    Reduced pressure;   

Others  :  https://iopscience.iop.org/article/10.1088/1757-899X/158/1/012062/pdf
DOI  :  10.1088/1757-899X/158/1/012062

来源: IOP

【 摘 要 】

One possibility of reducing the influence of contamination of the plasma volume, when initiating the microwave discharges using antennas, is to cover the antenna with a dielectric. The results of 1-D and 2-D modeling showing the impact of such dielectric cover on the parameters of a non-equilibrium plasma of an electrode microwave discharge in hydrogen at reduced pressure (the change of the electrodynamics of the discharge, charge deposition on the dielectric surface, changing the catalytic properties of the surface of the antenna) are presented in the article.