The methods of decrease operating pressure of fast neutrals source

12th International Conference on Gas Discharge Plasmas and Their Applications

Barchenko, V.T.^1 ; Komlev, A.E.^2 ; Babinov, N.A.^1 ; Vinogradov, M.L.^1

Department of Electron Devices and Systems, Saint Petersburg Electrotechnical University LETI, Professora Popova str., 5, St. Petersburg

197376, Russia^1

Department of Physical Electronics and Technologies, Saint Petersburg Electrotechnical University LETI, Professora Popova str., 5, St. Petersburg

197376, Russia^2

关键词: Coatings deposition;    Dielectric surface;    External volume;    High-energy ions;    Neutral particles;    Operating pressure;    Surface processing;    Vacuum chambers;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/652/1/012018/pdf
DOI  :  10.1088/1742-6596/652/1/012018

来源: IOP

【 摘 要 】

The fast neutral particles sources are more and more widely used in technologies of surface processing and coatings deposition, especially in the case of dielectric surfaces processing. However for substantial expansion of the sources applications scope it is necessary to decrease the pressure in the vacuum chamber at which they can operate. This article describes the methods to reduce the operating pressure of the fast neutral particles source with combined ions acceleration and its neutralization regions. This combination provide a total absence of the high-energy ions in the particles beam. The main discussed methods are creation of pressure drop between internal and external volumes of the source and working gas preionization which is provided by combustion of auxiliary gas discharge.