Adhesion analysis for chromium nitride thin films deposited by reactive magnetron sputtering

7th International Conference on Advanced Concepts in Mechanical Engineering

Rusu, F.M.^1 ; Merie, V.V.^2 ; Pintea, I.M.^1 ; Molea, A.^3

Mechanical Systems Engineering Department, Technical University of Cluj-Napoca, Cluj-Napoca, Romania^1

Materials Science and Engineering Department, Technical University of Cluj-Napoca, Cluj-Napoca, Romania^2

Physics and Chemistry Department, Technical University of Cluj-Napoca, Cluj-Napoca, Romania^3

关键词: Adhesion analysis;    Chromium nitride;    Deposition Parameters;    Deposition technology;    Discharge currents;    Multiple points;    Reactive magnetron sputtering;    Silicon substrates;   

Others  :  https://iopscience.iop.org/article/10.1088/1757-899X/147/1/012023/pdf
DOI  :  10.1088/1757-899X/147/1/012023

来源: IOP

【 摘 要 】

The thin film industry is continuously growing due to the wide range of applications that require the fabrication of advanced components such as sensors, biological implants, micro-electromechanical devices, optical coatings and so on. The selection regarding the deposition materials, as well as the deposition technology influences the properties of the material and determines the suitability of devices for certain real-world applications. This paper is focused on the adhesion force for several chromium nitride thin films obtained by reactive magnetron sputtering. All chromium nitride thin films were deposited on a silicon substrate, the discharge current and the argon flow being kept constant. The main purpose of the paper is to determine the influence of deposition parameters on the adhesion force. Therefore some of the deposition parameters were varied in order to study their effect on the adhesion force. Experimentally, the values of the adhesion force were determined in multiple points for each sample using the spectroscopy in point mode of the atomic force microscope. The obtained values were used to estimate the surface energy of the CrN thin films based on two existing mathematical models for the adhesion force when considering the contact between two bodies.