Study on deposition technique and properties of Pd/Ag alloy film sensor supported on ceramic substrate

2016 Global Conference on Polymer and Composite Materials

材料科学;化学

Geng, Z.T.^1 ; He, Q.^1 ; Jin, C.G.^2

School of Energy Power and Mechanical Engineering, North China Electric Power University, Beijing

l00089, China^1

KAIENTE Technology CO., Ltd., Beijing

102606, China^2

关键词: Ceramic substrates;    Deposition technique;    Hydrogen concentration;    Performance characterization;    Photochemical etching;    Reproducibilities;    Sensitive materials;    Transition layers;   

Others  :  https://iopscience.iop.org/article/10.1088/1757-899X/137/1/012009/pdf
DOI  :  10.1088/1757-899X/137/1/012009

学科分类：材料科学（综合）

来源: IOP

【 摘 要 】

Developing high-quality hydrogen sensitive material is the core part of hydrogen sensor, whose performance is determined by the sensitive response, reproducibility and recovery of hydrogen material etc. In order to overcome the defects of hydrogen embrittlement in previous hydrogen sensor which were based on the pure palladium, sliver as the second component added to the palladium was studied. Using photochemical etching technology to produce a bent metal mask, the mask is put on the ceramic substrate. Firstly, the thin film of Ta2O5as a transition layer grew on the ceramic substrate. Then, a series of Pd/Ag alloy film sensors were prepared, and each performance characterization of Pd/Ag alloy film was studied. Testing results indicated that the thin film had a good linear output performance at 0∼30% hydrogen concentration range, and demonstrates a high responsiveness and good repeatability. With temperature increasing, the strength of the responsive signal of the Pd/Ag alloy film decreases and its responsive time was also shortened.