会议论文详细信息
8th National Scientific Conference Advances in Electrotechnology (Postepy w Elektrotechnologii) | |
Thin-film TiPbO3 varistors obtained by two-source magnetron sputtering | |
无线电电子学 | |
Ziaja, J.^1 ; Lewandowski, M.^1 | |
Department of Electrical Engineering Fundamentals, Wroclaw University of Technology, Poland^1 | |
关键词: Current voltage; Metallic targets; Nonlinearity coefficient; Power conditions; Process gas; Reactive process; Two sources; | |
Others : https://iopscience.iop.org/article/10.1088/1757-899X/113/1/012007/pdf DOI : 10.1088/1757-899X/113/1/012007 |
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来源: IOP | |
【 摘 要 】
The paper presents the method of obtaining thin films of TiPbO3by two-source magnetron sputtering DC-M. The films were obtained in a reactive process of sputtering metallic targets of titanium (Ti) and lead (Pb). The research involved the impact of the time of sputtering of the respective targets on voltage-dependent resistance of the obtained films for different power conditions, pressures of process gases and the powers provided on the targets. The obtained nonlinearity coefficients and the current-voltage I(U) characteristics were within the following range.
【 预 览 】
Files | Size | Format | View |
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Thin-film TiPbO3 varistors obtained by two-source magnetron sputtering | 855KB | download |