Research on modes of plasma generation in low-pressure discharge for themal radiation processes

International Scientific Conference on "Radiation-Thermal Effects and Processes in Inorganic Materials"

材料科学;物理学

Koval, T.V.^1 ; Lopatin, I.V.^2 ; Hung, Nguyen Bao^1

National Research Tomsk Polytechnic University, 30, Lenin Ave., Tomsk

634050, Russia^1

Institute of High Current Electronics, Siberian Branch, Russian Academy of Sciences, 2/3, Akademichesky Ave., Tomsk

634055, Russia^2

关键词: External currents;    Ion current density;    Low pressure discharge;    Low pressure glow discharges;    Plasma generation;    Plasma parameter;    Radiation process;    Theoretical research;   

Others  :  https://iopscience.iop.org/article/10.1088/1757-899X/81/1/012056/pdf
DOI  :  10.1088/1757-899X/81/1/012056

学科分类：材料科学（综合）

来源: IOP

【 摘 要 】

In this work a theoretical research on modes of low-pressure glow discharge generation and its parameters in a large area hollow cathode are carried out. The relations describing the dependence of the burning voltage on the gas pressure and the geometry of the system were obtained. It is shown that it is possible to adjust the ion current density and burning voltage by external current injection independently of the surface area and material of the processed parts. This work also carries out a numerical study of the influence of plasma parameters on the heating of processed parts. Theoretical results are compared with experimental data.