Formation of low-frequency periodic structures in a pulsed magnetron discharge

9th International Conference on Modern Techniques of Plasma Diagnostics and their Application

Kaziev, A.V.^1 ; Khodachenko, G.V.^1 ; Kharkov, M.M.^1

Plasma Physics Department, National Research Nuclear University, MEPhI (Moscow Engineering Physics Institute), 31 Kashirskoe shosse, Moscow

115409, Russia^1

关键词: Crossed electric and magnetic fields;    Ionization instability;    Low pressure discharge;    Magnetic field perturbations;    Magnetron discharges;    Periodic process;    Plasma structure;    Pulsed magnetron discharges;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/666/1/012024/pdf
DOI  :  10.1088/1742-6596/666/1/012024

来源: IOP

【 摘 要 】

Periodic plasma structures are observed in non-sputtering magnetron discharge (NSMD) that is the transient quasi-stationary low-voltage regime between the high-current magnetron discharge (HCIMD) and an arc. The fast camera imaging synchronized with the magnetic probe diagnostics reveals the correlation between the observed rotation of the plasma inhomogeneities and the magnetic field perturbation behaviour. The frequencies of the periodic processes fall into kHz-range. A simple analytical model of the ionization instability in crossed electric and magnetic fields is suggested for the low-pressure discharge case. Using the model, the possible ranges of wavelengths and frequencies for the plasma inhomogeneities are evaluated. The results show good agreement between the experimental data and theory.