The use of thin diamond films in fiber-optic low-coherence interferometers

39th International Microelectronics and Packaging IMAPS Poland 2015 Conference

无线电电子学

Milewska, D.^1 ; Karpienko, K.^1

Department of Metrology and Optoelectronics, Faculty of Electronics, Telecommunications and Informatics, Gdask University of Technology, Narutowicza Street 11/12, Gdask

80-233, Poland^1

关键词: Boron-doped diamond films;    Low coherence interferometers;    Metrological parameters;    Microwave plasma;    Optimal conditions;    Reflective surfaces;    Superluminescent diode;    Thin diamond films;   

Others  :  https://iopscience.iop.org/article/10.1088/1757-899X/104/1/012023/pdf
DOI  :  10.1088/1757-899X/104/1/012023

来源: IOP

【 摘 要 】

In this paper we present the use of thin diamond films in fiber-optic low-coherence interferometers. Two kinds of diamond surfaces were used: undoped diamond film and boron- doped diamond film. They were deposited on glass plates as well as silicon layers. A conventionally used mirror was used as a reference layer. Diamond films were deposited using Microwave Plasma Enhanced Chemical Vapour Deposition (μPE CVD) system. Measurements were performed using two superluminescent diodes (SLD) with wavelengths of 1300 mm and 1550 mm. The optimal conditions for each layers were examined: the required wavelength of the light source and the length of Fabry-Perot interferometer cavity. Metrological parameters of Fabry-Perot interferometer with different mirrors were compared. The presented thin diamond films may be an interesting alternative to the commonly used reflective surfaces.