Low energy ELEctron driven chemistry for the advantage of emerging NAno-fabrication methods (ELENA); a Marie Sk?odowska-Curie Innovative Training Network

30th International Conference on Photonic, Electronic, and Atomic Collisions

Ingólfsson, Oddur^1

Science Institute and Department of Chemistry, University of Iceland, Dunhagi 3, Reykjavík

107, Iceland^1

关键词: Focused electron beam induced deposition;    Low energy electrons;    Nano-fabrication methods;    Training network;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/875/7/062043/pdf
DOI  :  10.1088/1742-6596/875/7/062043

来源: IOP

【 摘 要 】

Synopsis The current contribution relates to a recently endorsed Marie Sklodowska-Curie Innovative Training Network on Low energy ELEctron driven chemistry for the advantage of emerging NAno-fabrication methods; ELENA. Here we discuss the objectives of ELENA relating to the understanding the low energy electron induced processes underpinning two emerging nanotechnology methods; focused electron beam induced deposition (FEBID) and extreme ultra violet lithography (EUVL).