Physical basis of the device for surface cleanliness measurement

24th International Conference on Vacuum Technique and Technology

Gavriushin, S.S.^1 ; Poliakov, V.B.^2 ; Prokhorov, E.P.^1 ; Deulin, E.A.^1

Bauman Moscow State Technical University, Moscow

105005, Russia^1

OOO SKTB ELPA, Uglich

152613, Russia^2

关键词: Calibration graphs;    Physical model;    Residual pressures;    Surface cleanliness;    Technical realization;    Temperature and relative humidity;    Variable conditions;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/872/1/012051/pdf
DOI  :  10.1088/1742-6596/872/1/012051

来源: IOP

【 摘 要 】

The physical model of the device for surface cleanliness measurement and its technical realization are being considered in this paper. The number of gas monolayers being sorbed on the experimental surfaces is considered as a cleanliness parameter of these surfaces. The calibration graphs for the device under variable conditions of gases residual pressure, temperature and relative humidity are shown.