Cleaning of the dielectric surfaces using a controlled gas-discharge source of fast neutral particles

24th International Conference on Vacuum Technique and Technology

Fadeev, A.S.^1 ; Talanov, A.S.^1 ; Kostrin, D.K.^1 ; Trifonov, S.A.^1 ; Lisenkov, A.A.^2 ; Goncharov, V.D.^1

Saint Petersburg Electrotechnical University, LETI, St.Petersburg

197376, Russia^1

Institute of Problems of Mechanical Engineering, Russian Academy of Sciences, St.Petersburg

199178, Russia^2

关键词: Clean surfaces;    Dielectric surface;    Gas discharge;    Neutral particles;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/872/1/012021/pdf
DOI  :  10.1088/1742-6596/872/1/012021

来源: IOP

【 摘 要 】

In the present work is proposed the design of a controlled gas-discharge source of fast neutral particles, allowing to clean surfaces of dielectric and semiconductor materials. Also are shown the results of the research of the source main working characteristics.